BSR-1000
A Backside Review SEM system that reduces process feedback time through in-fab, non-destructive wafer backside inspection and failure analysis.
SEM & E-beam Technology Partner
HiKM
SEM solutions for semiconductor in-line metrology, inspection, backside review, and legacy tool improvement.
제품 · 기술 · 적용분야
What We Do
An SEM technology partner connecting equipment, process, and operation expertise
HiKM supports equipment planning and operating-condition review based on practical understanding of semiconductor metrology and inspection, including CD-SEM, Defect Review SEM, e-beam inspection, ADR/ADC/EDS, and wafer backside review.
Key Highlights
Next-generation inspection solutions centered on non-destructive Backside Review SEM
Through BSR-1000, BSR-2000, and SEM-REELS, HiKM reduces the limitations of destructive analysis and advances in-fab inspection, review, and process-feedback workflows.
BSR-1000
Non-destructive Backside Review SEM application
160x
TAT reduction target
100x
Analysis-volume expansion target
KRISS
SEM-REELS core-technology collaboration
Why HiKM
An SEM technology partner connecting equipment, process, and analysis workflow
HiKM connects product review, technical consultation, and application-specific adoption requirements based on semiconductor metrology and inspection expertise.
Product ReviewBSR-1000-centered backside review SEM adoption guidance
Technology InsightSEM principles, e-beam control, and signal interpretation workflow
Application FitConsultation paths for semiconductor, battery, PCB/FPCB, and materials
ConsultationNext-step review based on sample, process, and installation context
Products
SEM Product Lineup
The lineup centers on the currently consultable BSR-1000, while BSR-2000 and SEM-REELS are introduced as development-roadmap models with limited public details.
BSR-2000
A next-generation SEM inspection model in the development roadmap. Detailed specifications and public scope will be shared progressively as development advances.
SEM-REELS
A development model under review as an expanded SEM solution. Product configuration and application scope will be announced when officially disclosed.
Technology
Technology pages that make SEM and e-beam principles clear
The technology section explains SEM principles, system architecture, application conditions, and differentiators for technical buyers.
- SEM principles and observation workflow
- E-beam control and inspection stability
- Adoption review points by sample and process
Applications
Supporting inspection and analysis challenges in precision manufacturing
Contact
Start your product and technical consultation
Share your sample, process, installation environment, resolution needs, and automation scope so the right product path and next consultation step can be reviewed.