FAQ

Frequently asked questions before equipment adoption

Common questions about product review, installation conditions, resources, and consultation are organized here.

Product review

Guides which product family to review first.

Installation

Basic checks for space, power, and operating environment.

Resources

Explains how to request catalogs and specification sheets.

Product inquiry

Configuration review for BSR-1000, CD-SEM, Review SEM, and custom solutions

Process consultation

Review goals for defect review, VC defects, backside analysis, and elemental analysis

Resources

Catalog, product material, and specification download area

View Resources
Technical support

Consultation for recipes, ADR/ADC/EDS, data upload, and operation conditions

Maintenance / refurbishment

Legacy tool maintenance, parts support, and robot overhaul consultation

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  • Automatically collected items: service usage records such as IP address, visit time, and browser information
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