Technical Support

Technical support and service for stable operation

This page separates equipment inspection, maintenance, and operation inquiries so support information can be shared quickly.

Inspection request

Reviews equipment status, symptoms, and usage environment.

Maintenance

Organizes regular inspection and consumable inquiries.

Operation support

Supports operation consultation by usage condition and inspection goal.

Product inquiry

Configuration review for BSR-1000, CD-SEM, Review SEM, and custom solutions

Process consultation

Review goals for defect review, VC defects, backside analysis, and elemental analysis

Resources

Catalog, product material, and specification download area

View Resources
Technical support

Consultation for recipes, ADR/ADC/EDS, data upload, and operation conditions

Maintenance / refurbishment

Legacy tool maintenance, parts support, and robot overhaul consultation

Consent to Personal Information Collection and Use
  • Items collected: inquiry type, company name, contact email, inquiry details
  • Automatically collected items: service usage records such as IP address, visit time, and browser information
  • Collection method: website support inquiry form
  • Purpose of use: product inquiry review, technical consultation, resource request response, and service or maintenance consultation
  • Retention and use period: 24 months after inquiry handling is completed, or the period required by applicable laws
  • Personal information is destroyed without delay when the retention period expires or the purpose of processing has been fulfilled.

※ You may refuse this consent, but service requests and use may be restricted if you do not agree.

Share your inquiry and our team will review it and follow up.